PLASMA INDUCED SURFACE MODIFICATION OF GAAS - AN X-RAY PHOTOELECTRON-SPECTROSCOPY (XPS) CHARACTERIZATION

被引：0
|
作者：
SAHA, NC [1 ]
TAM, G [1 ]
LEGGE, RN [1 ]
机构：
[1] MOTOROLA INC,PHOENIX,AZ 85008
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 08期
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D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：C364 / C364
页数：1
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