FAILURE OF ALUMINIUM CONTACTS TO SILICON IN SHALLOW DIFFUSED TRANSISTORS

被引：30

|

作者：

MCCARTHY, J

机构：

来源：

MICROELECTRONICS RELIABILITY | 1970年 / 9卷 / 02期

关键词：

D O I：

10.1016/0026-2714(70)90671-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：187 / &

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