SOME PROPERTIES OF AL-DOPED ZNO TRANSPARENT CONDUCTING FILMS PREPARED BY RF REACTIVE SPUTTERING

被引：25

作者：

IGASAKI, Y

ISHIKAWA, M

SHIMAOKA, G

机构：

[1] Shizuoka Univ, Japan

来源：

APPLIED SURFACE SCIENCE | 1988年 / 33-4卷

关键词：

D O I：

10.1016/0169-4332(88)90400-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：926 / 933

页数：8

共 18 条

[1] OPTICAL AND ELECTRICAL-PROPERTIES OF ZNO FILMS PREPARED BY SPRAY PYROLYSIS FOR SOLAR-CELL APPLICATIONS [J].

ARANOVICH, J ;

ORTIZ, A ;

BUBE, RH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (04) :994-1003

[2] ANOMALOUS OPTICAL ABSORPTION LIMIT IN INSB [J].

BURSTEIN, E .

PHYSICAL REVIEW, 1954, 93 (03) :632-633

[3] PROPERTIES OF ZNO FILMS DEPOSITED ONTO INP BY SPRAY PYROLYSIS [J].

EBERSPACHER, C ;

FAHRENBRUCH, AL ;

BUBE, RH .

THIN SOLID FILMS, 1986, 136 (01) :1-10

[4] REACTIVE SPUTTERING OF METALS IN OXIDIZING ATMOSPHERES [J].

HELLER, J .

THIN SOLID FILMS, 1973, 7 (02) :163-176

[5]

Igasaki Y., 1986, Bulletin of the Research Institute of Electronics, Shizuoka University, V21, P25

[6]

Igasaki Y., 1987, Journal of the Vacuum Society of Japan, V30, P467, DOI 10.3131/jvsj.30.467

[7] TRANSPARENT AND HIGHLY CONDUCTIVE FILMS OF ZNO PREPARED BY RF SPUTTERING [J].

ITO, K ;

NAKAZAWA, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (04) :L245-L247

[8] OPTICAL-PROPERTIES OF TRANSPARENT AND HEAT REFLECTING ZNO-AL FILMS MADE BY REACTIVE SPUTTERING [J].

JIN, ZC ;

HAMBERG, I ;

GRANQVIST, CG .

APPLIED PHYSICS LETTERS, 1987, 51 (03) :149-151

[9] HIGHLY TRANSPARENT AND CONDUCTING ZINC-OXIDE FILMS DEPOSITED BY ACTIVATED REACTIVE EVAPORATION [J].

LAU, WS ;

FONASH, SJ .

JOURNAL OF ELECTRONIC MATERIALS, 1987, 16 (03) :141-149

[10] ZNO/CDTE HETEROJUNCTIONS PREPARED BY RF SPUTTERING [J].

MANCINI, AM ;

PIERINI, P ;

VALENTINI, A ;

VASANELLI, L ;

QUIRINI, A .

THIN SOLID FILMS, 1985, 124 (01) :85-92

← 1 2 →