ACCURATE METALLIZATION CAPACITANCES FOR INTEGRATED-CIRCUITS AND PACKAGES

被引:32
作者
RUEHLI, AE [1 ]
BRENNAN, PA [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1109/JSSC.1973.1050400
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:289 / 290
页数:2
相关论文
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HILL, YM ;
RECKORD, NO ;
WINNER, DR .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1969, 13 (03) :314-&
[2]  
PATEL PD, 1971, IEEE T MICROW THEORY, VMT19, P862
[3]  
RUEHLI AE, 1973, IEEE T MICROWAVE THE, VMT21, P76
[4]  
WEEKS WT, 1970, IEEE T MICROW THEORY, VMT18, P35