CHARACTERIZATION AND MICROHARDNESS MEASUREMENT OF ELECTRON-BEAM-EVAPORATED ALUMINA COATINGS

被引：58

作者：

DUA, AK

GEORGE, VC

AGARWALA, RP

机构：

[1] BARC, India

来源：

THIN SOLID FILMS | 1988年 / 165卷 / 01期

关键词：

Electron Beams - Microscopic Examination--Scanning Electron Microscopy - Spectroscopy; Auger Electron;

D O I：

10.1016/0040-6090(88)90687-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Characterization of electron beam evaporated alumina coatings has been carried out using Auger electron spectroscopy, X-ray photoelectron spectroscopy and Rutherford backscattering spectroscopy techniques. The properties studied include surface morphology, adhesion, density and etch rate. The microhardness has been evaluated from the measured values on the substrate and the coating substrate composite.

引用

页码：163 / 172

页数：10