MECHANISM OF SPUTTERING OF SOLID-SURFACES BY ION-IMPACT

被引：12

作者：

POLLITT, KR ^{[1
]}

ROBB, JC ^{[1
]}

THOMAS, DW ^{[1
]}

机构：

[1] UNIV BIRMINGHAM,DEPT CHEM,BIRMINGHAM B15 2TT,W MIDLANDS,ENGLAND

来源：

NATURE | 1978年 / 272卷 / 5652期

关键词：

D O I：

10.1038/272436a0

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

引用

页码：436 / 437

页数：2

共 11 条

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Carter G., 1968, ION BOMBARDMENT SOLI

[7]

Kaminsky M., 1965, ATOMIC IONIC IMPACT, DOI 10.1007/978-3-642-46025-8

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PHYSICA, 1959, 25 (08) :742-744

[9] ELECTRON PROBE SURFACE MASS SPECTROMETRY STUDY OF HYDROGEN-100 NICKEL SYSTEM [J].

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SURFACE SCIENCE, 1968, 9 (02) :325-&

[10] THEORY OF SPUTTERING .I. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS [J].

SIGMUND, P .

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