ELECTRON-STIMULATED OXIDATION OF SILICON SURFACES

被引：30
作者：
MUNOZ, MC
SACEDON, JL
机构：
来源：
JOURNAL OF CHEMICAL PHYSICS | 1981年 / 74卷 / 08期
关键词：
D O I：
10.1063/1.441660
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：4693 / 4700
页数：8
相关论文
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