STRESS REDUCTION IN ION-BEAM SPUTTERED MIXED-OXIDE FILMS

被引：59
作者：
POND, BJ
DEBAR, JI
CARNIGLIA, CK
RAJ, T
机构：
来源：
APPLIED OPTICS | 1989年 / 28卷 / 14期
关键词：
D O I：
10.1364/AO.28.002800
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：2800 / 2805
页数：6
相关论文
共 28 条
[1]  
ALLEN TH, 1987, P SOC VACUUM COATERS, P27
[2]   MULTIPLE DETERMINATION OF THE OPTICAL-CONSTANTS OF THIN-FILM COATING MATERIALS [J].
ARNDT, DP ;
AZZAM, RMA ;
BENNETT, JM ;
BORGOGNO, JP ;
CARNIGLIA, CK ;
CASE, WE ;
DOBROWOLSKI, JA ;
GIBSON, UJ ;
HART, TT ;
HO, FC ;
HODGKIN, VA ;
KLAPP, WP ;
MACLEOD, HA ;
PELLETIER, E ;
PURVIS, MK ;
QUINN, DM ;
STROME, DH ;
SWENSON, R ;
TEMPLE, PA ;
THONN, TF .
APPLIED OPTICS, 1984, 23 (20) :3571-3596
[3]  
CAMPBELL DS, 1970, HDB THIN FILM TECHNO, pCH12
[4]  
Carniglia C. K., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V652, P158, DOI 10.1117/12.938373
[5]  
Carniglia C. K., 1988, Proceedings of the SPIE - The International Society for Optical Engineering, V895, P281, DOI 10.1117/12.944455
[6]  
CARNIGLIA CK, 1986, J OPT SOC AM A, V3, pP40
[7]   COMPOSITION AND STRESS STATE OF THIN-FILMS DEPOSITED BY ION-BEAM SPUTTERING [J].
CASTELLANO, RN ;
NOTIS, MR ;
SIMMONS, GW .
VACUUM, 1977, 27 (03) :109-117
[8]   OPTICAL-PROPERTIES OF SIO2-TIO2 COMPOSITE FILMS [J].
DEMIRYONT, H .
APPLIED OPTICS, 1985, 24 (16) :2647-2650
[9]   EFFECTS OF OXYGEN IN ION-BEAM SPUTTER DEPOSITION OF TITANIUM-OXIDES [J].
DEMIRYONT, H ;
SITES, JR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (04) :1457-1460
[10]   MICROSTRUCTURE OF DIELECTRIC THIN-FILMS FORMED BY E-BEAM CO-EVAPORATION [J].
FARABAUGH, EN ;
SANDERS, DM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :356-359
123