SPIN-COATING BEHAVIOR OF POLYIMIDE PRECURSOR SOLUTIONS

被引：21
|
作者：
LEVINSON, WA
ARNOLD, A
DEHODGINS, O
机构：
[1] IBM General Technology Division, East Fishkill, New York
来源：
POLYMER ENGINEERING AND SCIENCE | 1993年 / 33卷 / 15期
关键词：
D O I：
10.1002/pen.760331507
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
Experimental data confirm the utility of the following simple equation in predicting the spin coating behavior of polyimide precursor solutions: h = cbeta0k(beta1)omega(beta2)t(beta3) (1) in which c = polymer solution solids weight fraction; beta(i) = fitted coefficient (Greek letter beta); h = film thickness after cure or solvent removal; k = polymer solution kinematic viscosity, centistokes; t = time, and; omega = wafer spin speed, rpm (Greek letter omega).
引用
收藏
页码：980 / 988
页数：9
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