SPIN-COATING BEHAVIOR OF POLYIMIDE PRECURSOR SOLUTIONS

被引：21
|
作者：
LEVINSON, WA
ARNOLD, A
DEHODGINS, O
机构：
[1] IBM General Technology Division, East Fishkill, New York
来源：
POLYMER ENGINEERING AND SCIENCE | 1993年 / 33卷 / 15期
关键词：
D O I：
10.1002/pen.760331507
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
Experimental data confirm the utility of the following simple equation in predicting the spin coating behavior of polyimide precursor solutions: h = cbeta0k(beta1)omega(beta2)t(beta3) (1) in which c = polymer solution solids weight fraction; beta(i) = fitted coefficient (Greek letter beta); h = film thickness after cure or solvent removal; k = polymer solution kinematic viscosity, centistokes; t = time, and; omega = wafer spin speed, rpm (Greek letter omega).
引用
收藏
页码：980 / 988
页数：9
相关论文
共 50 条
  • [1] Theoretical analysis on spin coating of polyimide precursor solutions
    Chang, Y
    Wu, WC
    Chen, WC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2001, 148 (04) : F77 - F81
  • [2] PGO spin-coating precursor synthesis
    Zhuang, WW
    Zhang, FY
    Maa, JS
    Hsu, ST
    INTEGRATED FERROELECTRICS, 2001, 36 (1-4) : 235 - 243
  • [3] THE RHEOLOGY AND SPIN COATING OF POLYIMIDE SOLUTIONS
    JENEKHE, SA
    POLYMER ENGINEERING AND SCIENCE, 1983, 23 (15): : 830 - 834
  • [4] Spin-coating of polyimide-silica hybrid optical thin films
    Chang, CC
    Wei, KH
    Chen, WC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2003, 150 (08) : F147 - F150
  • [5] Ultra-thin zeolite films prepared by spin-coating -: Silicalite-1 precursor solutions
    Doyle, AM
    Rupprechter, G
    Pfänder, N
    Schlögl, R
    Kirschhock, CEA
    Martens, JA
    Freund, HJ
    CHEMICAL PHYSICS LETTERS, 2003, 382 (3-4) : 404 - 409
  • [6] Extended asymptotic solutions to the spin-coating model with small evaporation
    Cregan, Vincent
    O'Brien, Stephen B. G.
    APPLIED MATHEMATICS AND COMPUTATION, 2013, 223 : 76 - 87
  • [7] Preparation and Properties of Zinc Oxide Films by Spin-Coating Water Solution Precursor
    Wang Xiao-Yan
    Dong Gui-Fang
    Qiao Juan
    Duan Lian
    Wang Li-Duo
    Qiu Yong
    ACTA PHYSICO-CHIMICA SINICA, 2010, 26 (07) : 2049 - 2052
  • [8] spin-coating antireflective films
    不详
    ELECTRONICS LETTERS, 2018, 54 (06) : 331 - 331
  • [9] SPIN-COATING ON SUBSTRATE WITH TOPOGRAPHY
    GU, J
    BULLWINKEL, MD
    CAMPBELL, GA
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (03) : 907 - 913
  • [10] Spin-coating of a viscoplastic material
    Burgess, SL
    Wilson, SDR
    PHYSICS OF FLUIDS, 1996, 8 (09) : 2291 - 2297
12345