PRESSURE TRANSMITTER EMPLOYING A DIFFUSED SILICON SENSOR

被引:1
|
作者
KOTNIK, JT
HAMILTON, JH
机构
来源
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS AND CONTROL INSTRUMENTATION | 1970年 / IE17卷 / 04期
关键词
D O I
10.1109/TIECI.1970.229606
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
引用
收藏
页码:285 / &
相关论文
共 50 条
  • [21] A BIPOLAR INTEGRATED SILICON PRESSURE SENSOR
    LEE, MK
    LEE, BN
    JUNG, SM
    SENSORS AND ACTUATORS A-PHYSICAL, 1992, 34 (01) : 1 - 7
  • [22] CMOS INTEGRATED SILICON PRESSURE SENSOR
    ISHIHARA, T
    SUZUKI, K
    SUWAZONO, S
    HIRATA, M
    TANIGAWA, H
    IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1987, 22 (02) : 151 - 156
  • [23] A silicon micromachined resonant pressure sensor
    Tang, Zhangyang
    Fan, Shangchun
    Cai, Chenguang
    8TH CHINA INTERNATIONAL NANOSCIENCE AND TECHNOLOGY SYMPOSIUM (CINSTS09), 2009, 188
  • [24] MOS INTEGRATED SILICON PRESSURE SENSOR
    TANIGAWA, H
    ISHIHARA, T
    HIRATA, M
    SUZUKI, K
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (07) : 1191 - 1195
  • [25] Study of the fabrication of a silicon pressure sensor
    Chang, CC
    Lieu, CT
    Hsich, MK
    INTERNATIONAL JOURNAL OF ELECTRONICS, 1997, 82 (03) : 295 - 302
  • [26] PIEZORESISTIVE PRESSURE SENSOR WITH SILICON DIAPHRAGM
    BREIMESSER, F
    POPPINGER, M
    SCHWAIER, A
    SIEMENS FORSCHUNGS-UND ENTWICKLUNGSBERICHTE-SIEMENS RESEARCH AND DEVELOPMENT REPORTS, 1981, 10 (02): : 72 - 77
  • [27] MINIATURE SILICON RESONANT PRESSURE SENSOR
    GREENWOOD, JC
    SATCHELL, DW
    IEE PROCEEDINGS-D CONTROL THEORY AND APPLICATIONS, 1988, 135 (05): : 369 - 372
  • [28] Study of MEMS and Silicon Pressure Sensor
    Fan, Yanli
    Li, Qing'en
    2012 2ND INTERNATIONAL CONFERENCE ON APPLIED ROBOTICS FOR THE POWER INDUSTRY (CARPI), 2012, : 144 - 146
  • [29] DESIGN METHOD FOR SENSING BODY OF DIFFERENTIAL PRESSURE TRANSMITTER USING SILICON DIAPHRAGM-TYPE PRESSURE SENSOR (VOL 44, PG 791, 1995)
    MATSUOKA, Y
    YAMAMOTO, Y
    TOBITA, T
    SHIMADA, S
    YASUKAWA, A
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1995, 44 (06) : 1030 - 1030
  • [30] CANTILEVER-TYPE DISPLACEMENT SENSOR USING DIFFUSED SILICON STRAIN-GAUGES
    AI, M
    SHIMAZOE, M
    SOENO, K
    NISHIHARA, M
    YASUKAWA, A
    KANDA, Y
    SENSORS AND ACTUATORS, 1982, 2 (03): : 297 - 307