OBSERVATION OF MICROFABRICATED PATTERNS BY SCANNING TUNNELING MICROSCOPY

被引：20

作者：

OKAYAMA, S ^{[1
]}

KOMURO, M ^{[1
]}

MIZUTANI, W ^{[1
]}

TOKUMOTO, H ^{[1
]}

OKANO, M ^{[1
]}

SHIMIZU, K ^{[1
]}

KOBAYASHI, Y ^{[1
]}

MATSUMOTO, F ^{[1
]}

WAKIYAMA, S ^{[1
]}

SHIGENO, M ^{[1
]}

SAKAI, F ^{[1
]}

FUJIWARA, S ^{[1
]}

KITAMURA, O ^{[1
]}

ONO, M ^{[1
]}

KAJIMURA, K ^{[1
]}

机构：

[1] ELECTROTECH LAB,SAKURA,IBARAKI 305,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 02期

关键词：

D O I：

10.1116/1.575391

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：440 / 444

页数：5

共 14 条

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