GROWTH OF HYDROGENATED AMORPHOUS-SILICON BY AN INDUCTIVE COUPLING GLOW-DISCHARGE REACTOR

被引：1

作者：

YOKOTA, K

NAKAYAMA, S

OHNO, Y

KATAYAMA, S

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 06期

关键词：

D O I：

10.1143/JJAP.26.965

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：965 / 966

页数：2

共 50 条

[21] LASER ANNEALING OF GLOW-DISCHARGE AMORPHOUS-SILICON
SUSSMANN, RS
HARRIS, AJ
OGDEN, R
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 249 - 254
[22] ELECTROPHOTOGRAPHIC STUDIES OF GLOW-DISCHARGE AMORPHOUS-SILICON
ODA, S
SAITO, Y
SHIMIZU, I
INOUE, E
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1981, 43 (06): : 1079 - 1089
[23] INVESTIGATION OF THE GROWTH-KINETICS OF GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON USING A RADICAL SEPARATION TECHNIQUE
MATSUDA, A
TANAKA, K
JOURNAL OF APPLIED PHYSICS, 1986, 60 (07) : 2351 - 2356
[24] GROWTH AND PROPERTIES OF GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON CARBON ALLOYS FROM SILANE PROPANE MIXTURES
QAYYUM, A
WILSON, JIB
IBRAHIM, K
ALSABBAGH, SK
EICKER, U
THIN SOLID FILMS, 1988, 164 : 221 - 226
[25] RAMAN-STUDY ON THE SILICON NETWORK OF HYDROGENATED AMORPHOUS-SILICON FILMS DEPOSITED BY A GLOW-DISCHARGE
HISHIKAWA, Y
WATANABE, K
TSUDA, S
OHNISHI, M
KUWANO, Y
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (04): : 385 - 389
[26] EFFECT OF DISCHARGE CONDITIONS ON CHARACTERISTICS OF HYDROGENATED AMORPHOUS-SILICON DEPOSITED BY DC GLOW-DISCHARGE DECOMPOSITION
JANG, J
LEE, C
SOLAR ENERGY MATERIALS, 1982, 7 (03): : 377 - 384
[27] EFFECT OF TEMPERATURE ON OPTICAL-PROPERTIES OF GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON FILMS
DONNADIEU, A
YOUS, B
BERGER, JM
FERRATON, JP
ROBIN, J
JOURNAL DE PHYSIQUE, 1981, 42 (NC4): : 655 - 658
[28] EFFECT OF SILANE DILUTION ON INTRINSIC STRESS IN GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON FILMS
HARBISON, JP
WILLIAMS, AJ
LANG, DV
JOURNAL OF APPLIED PHYSICS, 1984, 55 (04) : 946 - 951
[29] OPTICAL AND ELECTRICAL-PROPERTIES OF CHLORINATED AND HYDROGENATED AMORPHOUS-SILICON PREPARED BY GLOW-DISCHARGE
CHEVALLIER, J
KALEM, S
ALDALLAL, S
BOURNEIX, J
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1982, 51 (03) : 277 - 290
[30] HYDROGENATED AMORPHOUS-SILICON FILMS OBTAINED BY A LOW-PRESSURE DC GLOW-DISCHARGE
DELGADO, JC
ANDREU, J
SARDIN, G
ESTEVE, J
MORENZA, JL
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 46 (03): : 207 - 213

← 1 2 3 4 5 →