THE VAPOR-PHASE DEPOSITION OF REFRACTORY MATERIALS .1. GENERAL CONDITIONS AND APPARATUS

被引：101
作者：
CAMPBELL, IE
POWELL, CF
NOWICKI, DH
GONSER, BW
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1949年 / 96卷 / 05期
关键词：
D O I：
10.1149/1.2776795
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：318 / 333
页数：16
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