KINETICS OF ORDERED GROWTH OF SI ON SI(100) AT LOW-TEMPERATURES

被引：96
作者：
JORKE, H
HERZOG, HJ
KIBBEL, H
机构：
来源：
PHYSICAL REVIEW B | 1989年 / 40卷 / 03期
关键词：
D O I：
10.1103/PhysRevB.40.2005
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：2005 / 2008
页数：4
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