CATHODIC DEPOSITION OF AMORPHOUS-ALLOYS OF SILICON, CARBON, AND FLUORINE

被引:32
作者
LEE, CH
KROGER, FA
机构
关键词
D O I
10.1149/1.2124069
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:936 / 942
页数:7
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