Considerations on automation of coating machines

被引：0

作者：

Tilsch, Markus K. ^{[1
]}

O'Donnell, Michael S. ^{[1
]}

机构：

[1] JDSU, 1402 Mariner Way, Santa Rosa, CA 95407 USA

来源：

ADVANCED OPTICAL TECHNOLOGIES | 2015年 / 4卷 / 02期

关键词：

automation; controls; equipment; optical coating machines;

D O I：

10.1515/aot-2015-0015

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Most deposition chambers sold into the optical coating market today are outfitted with an automated control system. We surveyed several of the larger equipment providers, and nine of them responded with information about their hardware architecture, data logging, level of automation, error handling, user interface, and interfacing options. In this paper, we present a summary of the results of the survey and describe commonalities and differences together with some considerations of tradeoffs, such as between capability for high customization and simplicity of operation.

引用

页码：209 / 219

页数：11

共 9 条

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