DRY FORMATION OF A FATTY-ACID CRYSTALLIZED THIN-FILM AND APPLICATION AS AN ELECTRON-BEAM RESIST

被引：4
|
作者：
KATO, H
TAWATA, M
MORITA, S
HATTORI, S
机构：
[1] MEIJO UNIV,DEPT ELECT & ELECTR ENGN,NAGOYA,AICHI 468,JAPAN
[2] NAGOYA UNIV,DEPT ELECT & ELECTR ENGN,NAGOYA,AICHI 464,JAPAN
来源：
THIN SOLID FILMS | 1989年 / 180卷
关键词：
D O I：
10.1016/0040-6090(89)90087-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：299 / 304
页数：6
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