THE INFLUENCE OF NITROGEN AND OTHER GASES ON THE MAGNETIC-PROPERTIES OF BIAS-SPUTTERED CO-CR PERPENDICULAR FILMS FOR COMPUTER MEMORY APPLICATIONS

被引：7
作者：
MAPPS, DJ
MAHVAN, N
AKHTER, MA
机构：
[1] Plymouth Polytechnic, Engl, Plymouth Polytechnic, Engl
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1987年 / 23卷 / 05期
关键词：
COBALT CHROMIUM ALLOYS - Magnetic Properties - DATA STORAGE; MAGNETIC; -; NITROGEN; Applications; SPUTTERING;
D O I：
10.1109/TMAG.1987.1065356
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper investigates the effect of negative bias on sputtered CoCr layers for hard-disc memory applications. Negative bias can significantly improve the C-axis orientation and the perpendicular magnetic properties. Oxygen and nitrogen in particular degrade the desired properties but hydrogen can have a beneficial effect at low concentrations.
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收藏
页码：2473 / 2475
页数：3
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