IMPLANTATION OF RARE-EARTH ATOMS INTO SI AND III-V COMPOUNDS

被引：4

作者：

KOZANECKI, A ^{[1
]}

LANGER, JM ^{[1
]}

PEAKER, AR ^{[1
]}

机构：

[1] UNIV MANCHESTER,INST SCI & TECHNOL,MANCHESTER M60 1QD,LANCS,ENGLAND

来源：

ACTA PHYSICA POLONICA A | 1993年 / 83卷 / 01期

关键词：

D O I：

10.12693/APhysPolA.83.59

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Most recent results on doping of Si and III-V semiconductors by the implantation of rare-earth atoms are reviewed. It is shown that up to the concentration of about 10(18) cm-3 clustering and precipitation can be avoided. Post-implantation annealing leads not only to a decrease in radiation damage, but in some cases also to migration of rare-earth implants. The results of the rare earth lattice location by the Rutherford backscattering measurements are also reported.

引用

页码：59 / 70

页数：12

共 50 条

[31] STOICHIOMETRY OF III-V COMPOUNDS
NISHIZAWA, J
OYAMA, Y
MATERIALS SCIENCE & ENGINEERING R-REPORTS, 1994, 12 (6-8) : 273 - 426
[32] STOICHIOMETRY OF III-V COMPOUNDS
NISHIZAWA, J
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1993, 21 (2-3): : 107 - 119
[33] Nanocrystals of III-V compounds
不详
OPTICAL PROPERTIES OF SEMICONDUCTOR QUANTUM DOTS, 1997, 136 : 199 - 208
[34] FERRIMAGNESTISM OF RARE-EARTH COMPOUNDS
BURZO, E
LAZAR, DP
COMPTES RENDUS HEBDOMADAIRES DES SEANCES DE L ACADEMIE DES SCIENCES SERIE B, 1973, 276 (07): : 239 - 242
[35] PHARMACOLOGY OF RARE-EARTH COMPOUNDS
LAKIN, KM
ZIMAKOV, YA
NOVIKOVA, NV
FARMAKOLOGIYA I TOKSIKOLOGIYA, 1982, 45 (06): : 89 - 101
[36] INTERMETALLIC RARE-EARTH COMPOUNDS
TAYLOR, KNR
ADVANCES IN PHYSICS, 1971, 20 (87) : 551 - +
[37] Inversion of conductivity type of III-V compound layers in experiments with LPE growth from rare-earth containing melts
Srobar, F.
Prochazkova, O.
CRYSTAL RESEARCH AND TECHNOLOGY, 2009, 44 (06) : 597 - 602
[38] MAG2SI2 COMPOUNDS OF RARE-EARTH METALS
MAYER, I
COHEN, J
JOURNAL OF THE LESS-COMMON METALS, 1972, 29 (02): : 221 - &
[39] POSITRON-ANNIHILATION STUDY OF IMPURITY ATOMS IN III-V SEMICONDUCTOR COMPOUNDS
AREFEV, KP
PROKOPEV, EP
TSOI, AA
DERYABIN, AN
KHRYAPOV, VT
SOVIET PHYSICS SEMICONDUCTORS-USSR, 1982, 16 (01): : 88 - 89
[40] ON THE VALENCE STATE OF RARE-EARTH ATOMS IN TRANSITION-METAL INTERMETALLIC COMPOUNDS
DEBOER, FR
JOURNAL OF METALS, 1980, 32 (12): : 82 - 82

← 1 2 3 4 5 →