ULTRA HIGH-VACUUM COMPATIBLE METAL-ION BEAM SURFACE MODIFICATION SYSTEM

被引：0
作者：
MORI, Y
WANG, H
ENDO, K
YAMAUCHI, K
IDE, T
GOTO, H
机构：
[1] Department of Precision Engineering, Osaka University, Suita, Osaka 565
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 11期
关键词：
D O I：
10.1063/1.1141593
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A high current ion system for surface modification has been developed. It consists of a liquid metal ion source, a focusing lens system, deflection plates, a mass separator, and a deceleration electrode system. It can produce a high purity metal ion beam with an energy in the range of 10 eV to 10 keV and ion current up to 20 μA in a vacuum as low as 10-9 Torr.
引用
收藏
页码：3412 / 3415
页数：4
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