THEORETICAL THRESHOLD VOLTAGES FOR MOS FIELD EFFECT TRANSISTORS

被引:23
作者
RICHMAN, P
机构
[1] The Bayside Laboratory, Research Center of General Telephone, Electronics Laboratories Incorporated, Bayside, NY
关键词
D O I
10.1016/0038-1101(68)90105-6
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
By employing the charge neutrality condition in the vicinity of the gate insulator in the MOS structure, theoretical curves of the threshold voltages for both n- and p-channel MOSFETs are obtained as a function of substrate doping concentration, built-in positive charge at the oxide-silicon interface, oxide thickness, and surface trapping. Curves of theoretical threshold voltages for MOSFETs employing Al2O3-SiO2 gate insulators are also obtained. The effect of gold doping of the silicon substrate upon the threshold voltages of MOSFETs is discussed. As a result, the conditions which determine whether a particular MOSFET will be a depletion type or an enhancement type are specified as a function of the construction parameters of the device. © 1968.
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页码:869 / &
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