DESIGN AND IMPLEMENTATION OF A PRECISION MATERIAL HANDLING ROBOT CONTROL-SYSTEM

被引：2
|
作者：
VANDOREN, MJ
SLOCUM, A
机构：
[1] Deparument of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, 77 Massachusetts Avenue
来源：
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE | 1995年 / 35卷 / 07期
关键词：
Algorithms - Computer simulation - Digital signal processing - Kinematics - Manipulators - Materials handling - Mathematical models - Robotics - Semiconductor device manufacture - Silicon wafers - Three term control systems - Torque control;
D O I：
10.1016/0890-6955(94)00043-J
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Robotic transfer of silicon wafers in semiconductor fabrication facilities is becoming increasingly attractive. This paper discusses the benefits of a DSP-based computed torque controller over standard PID algorithms for a three degree of freedom, cleanroom material transfer manipulator. Formulation of robot kinematics, dynamic modeling, and numerical simulation assist in the implementation of this nonlinear controller. Simulation and experimental data correlate well and show that a factor of 2-3 times improvement in performance can be obtained.
引用
收藏
页码：1003 / 1014
页数：12
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