SURFACE MODIFICATIONS OF ELECTRONIC MATERIALS INDUCED BY PLASMA-ETCHING

被引：35

作者：

OEHRLEIN, GS

ROBEY, SW

LINDSTROM, JL

CHAN, KK

JASO, MA

SCILLA, GJ

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 07期

关键词：

D O I：

10.1149/1.2097160

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2050 / 2057

页数：8

共 35 条

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