DETERMINATION OF IMPLANTATION PROFILES IN SOLIDS BY SECONDARY ION MASS-SPECTROMETRY

被引：18

|

作者：

MAUL, J

WITTMAACK, K

SCHULZ, F

机构：

来源：

PHYSICS LETTERS A | 1972年 / A 41卷 / 02期

关键词：

D O I：

10.1016/0375-9601(72)91101-2

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

收藏

页码：177 / +

页数：1

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