ENHANCEMENT OF NOBLE GAS PUMPING FOR A SPUTTER-ION PUMP

被引：5

作者：

KOMIYA, S

YAGI, N

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.1492623

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：54 / &

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[2] SPUTTERING YIELDS FOR LOW ENERGY HE+-, KR+-, AND XE+-ION BOMBARDMENT
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[3] INFLUENCE OF THE ANGLE OF INCIDENCE ON SPUTTERING YIELDS
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[4] WEHNER GK, 1962, 8 T AVS VAC S 2 INT, V1, P239