STUDIES ON SURFACE PREPARATION

被引：5

作者：

FAUST, JW

机构：

[1] Materials Research Laboratory, Pennsylvania State University, University Park

来源：

SURFACE SCIENCE | 1969年 / 13卷 / 01期

关键词：

D O I：

10.1016/0039-6028(69)90236-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Surfaces upon which physical measurements or devices are to be made must be very carefully prepared. The general steps in surface preparation are a) cutting, b) lapping and polishing, and c) etching. Each of these topics is briefly reviewed to point out the important places where things could go wrong. In addition, the studies of the cleanness of the oxide layer and purity of chemicals used in the processes are discussed. © 1969.

引用

页码：60 / &

共 23 条

[1]

ARCHER R, PRIVATE COMMUNICATIO

[2] LARGE-AREA JET ELECTROLYTIC POLISHING OF GE AND SI [J].