共 6 条
- [2] GLOERSEN PG, 1976, SOLID STATE TECH APR, P68
- [3] INFLUENCE OF SAMPLE INCLINATION AND ROTATION DURING ION-BEAM ETCHING ON ION-ETCHED STRUCTURES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (05): : 1712 - 1717
- [5] REDEPOSITION - SERIOUS PROBLEM IN RF SPUTTER ETCHING OF STRUCTURES WITH MICRONMETER DIMENSIONS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 281 - 284
- [6] SPENCER EG, 1971, J VAC SCI TECHNOL, V8, P52