PATTERN FABRICATION BY OBLIQUE-INCIDENCE ION-BEAM ETCHING

被引:33
作者
GOKAN, H
ESHO, S
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 01期
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D O I
10.1116/1.570693
中图分类号
O59 [应用物理学];
学科分类号
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页码:23 / 27
页数:5
相关论文
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    DIMIGEN, H
    [J]. IEEE TRANSACTIONS ON MAGNETICS, 1973, MAG9 (03) : 405 - 408
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    LEHMANN, HW
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    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 281 - 284
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