MOLECULAR-DYNAMICS INVESTIGATION OF CLUSTER-BEAM DEPOSITION

The interaction of energetic clusters of atoms with solid surfaces has been investigated by molecular-dynamics computer simulation with use of Foiler-Baskes-Daw embedded-atom-method potentials for Cu. Clusters containing 13 or 92 atoms impinging on Cu(100) surfaces with energies ranging between 13 and 326 eV were investigated with respect to defect production, atomic mixing, and implantation. It is found that a 13-atom cluster with 326 eV completely embeds itself within the substrate while creating a small crater of six vacancies. A 92-atom cluster of the same energy, on the other hand, forms two epitaxial layers on the surface without creating point defects, but with some penetration. In both events, the penetration of the cluster is accommodated by plastic deformation of the substrate. By following the time evolution of these events, a clear picture cluster-solid interaction is obtained. © 1990 The American Physical Society.