ELECTRONIC PROMOTION OF SILICON NITRIDATION BY ALKALI-METALS

被引：56

作者：

SOUKIASSIAN, P

BAKSHI, MH

STARNBERG, HI

HURYCH, Z

GENTLE, TM

SCHUETTE, KP

机构：

[1] NO ILLINOIS UNIV,DEPT PHYS,DE KALB,IL 60115

[2] DOW CORNING CORP,MIDLAND,MI 48640

来源：

PHYSICAL REVIEW LETTERS | 1987年 / 59卷 / 13期

关键词：

D O I：

10.1103/PhysRevLett.59.1488

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1488 / 1491

页数：4

共 18 条

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