ANNEALING BEHAVIOR AND ETCHING PHENOMENA OF MICRODEFECTS IN DISLOCATION-FREE FLOAT-ZONE SILICON

被引：17
作者：
DARAGONA, FS
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1971年 / 7卷 / 02期
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D O I：
10.1002/pssa.2210070232
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：577 / &
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