A NEW 2-DIMENSIONAL PARTICLE DETECTOR FOR A TOROIDAL ELECTROSTATIC ANALYZER

被引：107

作者：

TROMP, RM ^{[1
]}

COPEL, M ^{[1
]}

REUTER, MC ^{[1
]}

VONHOEGEN, MH ^{[1
]}

SPEIDELL, J ^{[1
]}

KOUDIJS, R ^{[1
]}

机构：

[1] HIGH VOLTAGE ENGN EUROPA BV,AMERSFOORT,NETHERLANDS

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1991年 / 62卷 / 11期

关键词：

D O I：

10.1063/1.1142199

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We describe a new two-dimensional detector for the detection of ions scattered from a solid target, analyzed in energy and scattering angle by a toroidal electrostatic analyzer. The detector resolves the scattering angle with a resolution of 0.4-degrees over a range of 25-degrees, and the ion energy with a resolution of 120 eV over a range of 2000 eV, at 100 keV ion energy. The energy resolution of the spectrometer was improved with a factor 4 relative to its previous performance with a one-dimensional scattering angle detector, while-at the same time-the dose efficiency (count/mu-C) was improved by a factor 5-10.

引用

页码：2679 / 2683

页数：5

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