FABRICATION OF CHANNEL OPTICAL-WAVEGUIDE USING CO2-LASER

被引：4
作者：
TERUI, H
KOBAYASHI, M
机构：
[1] Nippon Telegraph & Telephone Public Corporation, Ibaraki Electrical Communication Laboratory, Tokai
来源：
ELECTRONICS LETTERS | 1979年 / 15卷 / 03期
关键词：
Laser beam applications; Optical films; Silicon compounds; Tantalum compounds;
D O I：
10.1049/el:19790058
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A CO2-laser-irradiated SiO2-Ta2O5 optical-film waveguide has been found to produce up to 2% refractive-index decrease. The usefulness of the CO2-laser technique has been demonstrated by fabricating a curved multimode channel waveguide with 1 dB/cm propagation loss in the thin film. © 1979, The Institution of Electrical Engineers. All rights reserved.
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页码：79 / 80
页数：2
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