ADHESION ENHANCEMENTS AND INTERNAL-STRESS IN MGF2 FILMS DEPOSITED WITH ION-BEAM ASSISTANCE

被引：11
作者：
JACOBS, SD
HRYCIN, AL
CERQUA, KA
KENNEMORE, CM
GIBSON, UJ
机构：
[1] UNIV ROCHESTER,INST OPT,NEW YORK STATE CTR ADV OPT TECHNOL,ROCHESTER,NY 14623
[2] UNIV ARIZONA,CTR OPT SCI,TUCSON,AZ 85721
来源：
THIN SOLID FILMS | 1986年 / 144卷 / 01期
关键词：
The work performed at the University of Rochester was supported in part by the New York State Center for Advanced Optical Technology of The Institute of Optics; the U.S. Department of Energy Office of Inertial Fusion under Agreement DE-FC08-85DP40200 and by the Laser Fusion Feasibility Project at the Laboratory for Laser Energetics which has the following sponsors: Empire State Electric Energy Research Corporation; General Electric Company; New York State Energy Research and Development Authority; Ontario Hydro; Southern California Edison Company and the University of Rochester.The work performed at the University of Arizona was supported by the U.S. Army Research Office and the U.S. Air Force Office of Scientific Research. Such support does not imply endorsement of the contents by any of the above parties;
D O I：
10.1016/0040-6090(86)90070-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
25
引用
收藏
页码：69 / 76
页数：8
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