GROWTH AND PROPERTIES OF ALGAAS/GAAS HETEROSTRUCTURES ON GAAS (110) SURFACE

被引:21
作者
ZHOU, JM
HUANG, Y
LI, YK
JIA, WY
机构
[1] Chinese Acad of Sciences, Beijing, China, Chinese Acad of Sciences, Beijing, China
关键词
Semiconducting aluminum compounds - SEMICONDUCTOR DEVICES - Heterojunctions;
D O I
10.1016/0022-0248(87)90394-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We report on MBE growth of high quality modulation doped heterostructures on GaAs (110) without intentional misorientation. PL measurements have shown that a high quality (110) 2DEG system was obtained. Quantum Hall effect measurements and mobility enhancement results show that the AlGaAs/GaAs(110) interface displays the same two-dimensional electron gas characteristics as the AlGaAs/GaAs (100) interface.
引用
收藏
页码:221 / 223
页数:3
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