SIOX/TAOX GATE INSULATOR A-SI TFT FOR LIQUID-CRYSTAL DISPLAYS

[1] Funada F., 1986, 1986 SID International Symposium. Digest of Technical Papers. First Edition, P293

[2] OANA Y, 1985, 1985 C REC INT DISPL, P32

[3] Takeda M., 1986, JAPAN DISPLAY 86 TOK, P204

[4] LOW-TEMPERATURE THERMAL-OXIDATION OF AMORPHOUS-SILICON AND ITS APPLICATION TO AMORPHOUS-SILICON MOS-TRANSISTORS [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (09): : L733 - L735

[1] Funada F., 1986, 1986 SID International Symposium. Digest of Technical Papers. First Edition, P293

[2] OANA Y, 1985, 1985 C REC INT DISPL, P32

[3] Takeda M., 1986, JAPAN DISPLAY 86 TOK, P204

[4] LOW-TEMPERATURE THERMAL-OXIDATION OF AMORPHOUS-SILICON AND ITS APPLICATION TO AMORPHOUS-SILICON MOS-TRANSISTORS [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (09): : L733 - L735