TRANSMISSION ELECTRON-MICROSCOPY STUDIES OF TIC AND VC-TIC DEPOSITS PREPARED BY ACTIVATED REACTIVE EVAPORATION

被引：40

作者：

JACOBSON, BE ^{[1
]}

BUNSHAH, RF ^{[1
]}

NIMMAGADDA, R ^{[1
]}

机构：

[1] UNIV CALIF LOS ANGELES,DEPT MAT,LOS ANGELES,CA 90025

来源：

THIN SOLID FILMS | 1978年 / 54卷 / 01期

关键词：

D O I：

10.1016/0040-6090(78)90281-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：107 / 118

页数：12

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[6]

MOVCHAN BA, 1969, PHYS METALS METALLOG, V28, P83

[7]

MOVCHAN BA, 1977, SEP INT C EL PAT WEL

[8] HIGH-RATE DEPOSITION OF VC-TIC ALLOY CARBIDES BY ACTIVATED REACTIVE EVAPORATION [J].

NIMMAGADDA, R ;

BUNSHAH, RF .

THIN SOLID FILMS, 1977, 45 (03) :447-452

[9]

Storms E.K., 1967, REFRACTORY CARBIDES

[10] HIGH-RATE THICK-FILM GROWTH [J].

THORNTON, JA .

ANNUAL REVIEW OF MATERIALS SCIENCE, 1977, 7 :239-260

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