REVERSE SEQUENCE OF FORMATION OF TITANIUM NITRIDES BY NITROGEN IMPLANTATION

被引：24

作者：

ZHOU, X

DONG, HK

LI, HD

LIU, BX

机构：

[1] TSINGHUA UNIV,DEPT ENGN PHYS,BEIJING,PEOPLES R CHINA

[2] CHINESE CTR ADV SCI & TECHNOL,CTR THEORET PHYS,WORLD LAB,BEIJING,PEOPLES R CHINA

来源：

关键词：

D O I：

10.1063/1.340437

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4942 / 4945

页数：4

共 10 条

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[5] LI HD, 1986, THIN FILMS, P77
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[7] STRUCTURAL TRANSFORMATION INDUCED BY NITROGEN IMPLANTATION IN THIN METAL-FILMS
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[8] MA E, 1986, MATERIAL RES SOC S P, V54, P215
[9] SYNTHESIS OF BORIDES, CARBIDES AND NITRIDES IN METAL-SURFACES BY HIGH-DOSE ION-IMPLANTATION
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[J]. JOURNAL OF THE LESS-COMMON METALS, 1986, 117 (1-2): : 115 - 119
[10] ZHOU X, 1987, IN PRESS OCT INT S A