GAAS FETS WITH SILICON-IMPLANTED CHANNELS

被引:7
作者
KUNG, JK [1 ]
MALBON, RM [1 ]
LEE, DH [1 ]
机构
[1] HUGHES AIRCRAFT CO,TORRANCE RES CTR,TORRANCE,CA 90509
关键词
D O I
10.1049/el:19770137
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:187 / 188
页数:2
相关论文
共 3 条
[1]   ION-IMPLANTED MICROWAVE FIELD-EFFECT TRANSISTORS IN GAAS [J].
HUNSPERGER, RG ;
HIRSCH, N .
SOLID-STATE ELECTRONICS, 1975, 18 (04) :349-353
[2]   ANNEALING OF ION-IMPLANTED GAAS IN A CONTROLLED ATMOSPHERE [J].
MALBON, RM ;
LEE, DH ;
WHELAN, JM .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (09) :1413-1415
[3]   GAAS FIELD-EFFECT TRANSISTORS BY SELECTIVE SULFUR-ION IMPLANTATION [J].
MIZUTANI, T ;
ISHIDA, S ;
FUJIMOTO, M .
ELECTRONICS LETTERS, 1976, 12 (17) :431-432