STRUCTURAL STUDY OF ZNS THIN-FILMS PREPARED BY SPRAY-PYROLYSIS

被引:103
作者
AFIFI, HH [1 ]
MAHMOUD, SA [1 ]
ASHOUR, A [1 ]
机构
[1] MENIA UNIV,FAC SCI,DEPT PHYS,MENIA,EGYPT
关键词
DEPOSITION PROCESS; PYROLYSIS; STRUCTURAL PROPERTIES; X-RAY DIFFRACTION;
D O I
10.1016/0040-6090(95)06565-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin films of ZnS were prepared by spray pyrolysis. The effect of substrate temperature as well as deposition time and annealing in air and in a nitrogen atmosphere on some structural features was investigated by X-ray diffraction. At a substrate temperature of 300 degrees C, ZnS appears almost in amorphous form. With rising substrate temperature, the crystallinity was improved. At 550 degrees C, a well-crystallized cubic phase of ZnS was obtained. The films were preferably oriented with the [111] direction perpendicular to the surface. Annealing in air created ZnO, no evidence for oxides was found when annealing was carried out in a nitrogen atmosphere. Therefore, using a spray pyrolysis technique with a substrate temperature of 500 degrees C and annealing in a non-oxidizing atmosphere for about 120 min, one can obtain well-crystallized single-phase cubic ZnS thin films.
引用
收藏
页码:248 / 251
页数:4
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