ULTIMATE PRESSURE OF THE ORDER OF 10-13 TORR IN AN ALUMINUM-ALLOY VACUUM CHAMBER

被引：45
作者：
ISHIMARU, H
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期
关键词：
D O I：
10.1116/1.575916
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
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页码：2439 / 2442
页数：4
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