LITHOGRAPHIC PATTERNING OF SUPERCONDUCTING YBCO FILMS

被引：12

作者：

MISHRA, SK

PATHAK, LC

RAY, SK

KAL, S

BHATTACHARYA, D

LAHIRI, SK

CHOPRA, KL

机构：

[1] INDIAN INST TECHNOL,DEPT PHYS & METEOROL,KHARAGPUR 721302,W BENGAL,INDIA

[2] INDIAN INST TECHNOL,DEPT ELECTR & ECE,KHARAGPUR 721302,W BENGAL,INDIA

来源：

JOURNAL OF SUPERCONDUCTIVITY | 1992年 / 5卷 / 05期

关键词：

YBCO; MICROBRIDGE; LITHOGRAPHY; ETCHING;

D O I：

10.1007/BF00620502

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Microbridges of YBa2Cu3O7 thin films have been fabricated by conventional photolithography and wet chemical etching using EDTA, and by the lift-off lithography technique. The variation of etch rate with etch time, etchant temperature, and post-deposition sintering temperature has been studied. It has been shown that both techniques are useful for film patterning. However, an additional sintering step is necessary for the chemically etched sample to regain the original film properties. An order of increase in critical current density is observed for the patterned film.

引用

页码：445 / 449

页数：5

共 9 条

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[2] SUPERCONDUCTIVITY IN 2-MU-M WIDE STRIP LINE OF GD-BA-CU-O THIN-FILM FABRICATED BY LOW-TEMPERATURE PROCESSES [J].

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[3] LARGELY ANISOTROPIC SUPERCONDUCTING CRITICAL CURRENT IN EPITAXIALLY GROWN BA2YCU3O7-Y THIN-FILM [J].

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[9] SUPERCONDUCTING LINES FABRICATED FROM EPITAXIAL Y-BA-CU-O FILMS [J].

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