COMPUTER-SIMULATION OF ION-IMPLANTATION IN AMORPHOUS TARGETS

被引:0
作者
HAGGMARK, LG [1 ]
机构
[1] SANDIA NATL LAB,DIV THEORET,LIVERMORE,CA 94550
来源
JOURNAL OF METALS | 1981年 / 33卷 / 09期
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中图分类号
TF [冶金工业];
学科分类号
0806 ;
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页码:A9 / A9
页数:1
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