THERMAL-DIFFUSIVITY, SPECIFIC-HEAT AND THERMAL-CONDUCTIVITY OF CHEMICALLY VAPOR-DEPOSITED SI3N4

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作者：

HIRAI, T

HAYASHI, S

NIIHARA, K

机构：

来源：

AMERICAN CERAMIC SOCIETY BULLETIN | 1978年 / 57卷 / 12期

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中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

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页码：1126 / 1130

页数：5

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