PRODUCTION OF A LARGE-DIAMETER UNIFORM ECR PLASMA WITH A LISITANO COIL

被引：18

作者：

YONESU, A

TAKEUCHI, Y

KOMORI, A

KAWAI, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 09期

关键词：

D O I：

10.1143/JJAP.27.L1746

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L1746 / L1749

页数：4

共 13 条

[1] PROPERTIES OF A HIGH-BETA PLASMA PRODUCED BY ELECTRON-CYCLOTRON HEATING
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[2] SHELL STRUCTURE OF A HOT-ELECTRON PLASMA
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[3] PRODUCTION OF A LARGE DIAMETER HOT-ELECTRON PLASMA BY ELECTRON-CYCLOTRON RESONANCE HEATING
KAWAI, Y
SAKAMOTO, K
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1982, 53 (05) : 606 - 609
[4] PRODUCTION OF QUIESCENT DISCHARGE WITH HIGH ELECTRON TEMPERATURES
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ELLIS, RA
HOOKE, WM
STIX, TH
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1968, 39 (03) : 295 - &
[5] REACTIVE ION-BEAM ETCHING USING A BROAD BEAM ECR ION-SOURCE
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[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (01): : L4 - L6
[6] ANALYSIS OF A RADIO-FREQUENCY STRUCTURE USED FOR PLASMA PRODUCTION AND HEATING
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[J]. JOURNAL OF APPLIED PHYSICS, 1970, 41 (09) : 3739 - &
[7] MEASUREMENT OF POWER TRANSFER EFFICIENCY FROM MICROWAVE FIELD TO PLASMA UNDER ECR CONDITION
SAKAMOTO, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 (11) : 1993 - 1998
[8] MICROWAVE ION-SOURCE
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KANOMATA, I
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1977, 48 (07) : 762 - 766
[9] STIX TH, 1962, THEORY PLASMA WAVES, pCH10
[10] RF FIELD DISTRIBUTIONS IN A SLOTTED-TYPE LISITANO COIL
SUETSUGU, Y
KAWAI, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (08): : 1101 - 1106

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