共 31 条
[1]
Eichler J., Industrial applications of si-based cearmics, J. Kor. Ceram. Soc., 49, 6, pp. 561-565, (2012)
[2]
Lee J.D., Technology trends of high purity SiC material (in Korean), Ceramist, 15, 5, pp. 51-58, (2012)
[3]
Cho K.S., Yoon S.H., Jung H., Chae S.H., Lim K.Y., Kim Y.W., Park S.W., SiC material technology for semiconductor manufacturing process (in Korean), Ceramist, 12, 1, pp. 33-48, (2009)
[4]
Blake P., Bifano T., Dow T., Scattergood R.O., Precision machining of ceramic materials, Am. Ceram. Soc. Bull., 67, 6, pp. 1038-1043, (1988)
[5]
Jin H., Xu H., Quio G., Gao J., Jin Z., Study of machinable silicon carbide-boron nitride ceramic composites, Mater. Sci. Eng., A, 483-484, pp. 214-217, (2008)
[6]
Wu H., Zhang W., Fabrication and properties of ZrB<sub>2</sub>-SiC-BN machinable ceramics, J. Eur. Ceram. Soc., 30, 4, pp. 1035-1042, (2010)
[7]
Li H., Jin H., Zhang Q., Yang J., Jin Z., SiC/C machinable ceramics surface hardening by silicon infiltration, Scr. Mater., 63, 12, pp. 1177-1180, (2010)
[8]
Yamaguchi T., Technology of Characterization to Ceramics (in Jpn.), Ceramics, 19, 6, pp. 520-529, (1984)
[9]
Thomas H.A.J., Stevens R., Aluminium titanate - A literature review, Trans. J. Br. Ceram. Soc, 88, pp. 144-151, (1989)
[10]
Kim I.J., Zografou C., Thermal shock resistance of Al<sub>2</sub>TiO<sub>5</sub>ceramics prepared from electrofused powders (in Korean), J. Kor. Ceram. Soc., 35, 10, pp. 1061-1069, (1998)