IN-SITU ELLIPSOMETRIC DIAGNOSTICS FOR CONTROLLED GROWTH OF METAL-OXIDES WITH SURFACE CHEMICAL-REACTIONS

被引：21

作者：

KUMAGAI, H

TOYODA, K

机构：

[1] Laser Science Research Group, The Institute of Physical and Chemical Research (RIKEN), Wako, Saitama, 351-01

来源：

APPLIED SURFACE SCIENCE | 1994年 / 82-3卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(94)90262-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In situ diagnostics for controlled growth of metal oxides such as aluminum oxide with surface chemical reactions was successfully conducted with a spectroscopic ellipsometer. It was found that the self-limiting growth of aluminum oxide films at room temperature was clearly observed with alternate dosing of binary vapors of trimethylaluminum and hydrogen peroxide.

引用

页码：481 / 486

页数：6

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