ABSOLUTE FLUX MEASUREMENTS FOR X-RAY-LITHOGRAPHY BEAMLINES

A calorimeter is calibrated for use as an absolute radiometer for synchrotron radiation x-ray lithography (XRL) beamlines. Results of the characterization of two beamlines are reported and compared with theory. Photodiodes and a film detector were calibrated against the calorimeter and the performances of these ordinary radiometers are presented. Using the methods described in this paper an absolute flux reading was obtained with accuracies believed to be better than +/- 2%. The experimental results are compared with the prediction of a theoretical model called TRANSMIT. The code is used to predict the performance of XRL beamlines and is very suitable for "what if" types of scenarios.