SIC-TIC MULTIPHASED MATERIALS OBTAINED BY CVD

被引：15
|
作者：
TOUANEN, M
TEYSSANDIER, F
DUCARROIR, M
DEREP, JL
机构：
[1] UNIV PERPIGNAN,CNRS,INST SCI & GENIE MAT & PROC,F-66860 PERPIGNAN,FRANCE
[2] ETAB TECH CENT ARMEMENT,F-94114 ARCUEIL,FRANCE
来源：
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1991年 / 147卷 / 02期
关键词：
D O I：
10.1016/0921-5093(91)90851-D
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Carbide composite structures have been prepared by thermal chemical vapour deposition under atmospheric pressure from an input gaseous mixture composed of SiH2Cl2-C4H10-TiCl4-H2. Their morphologies are strongly dependent on the composition of the input gases leading to either micro- or nanostructures. The latter were investigated by transmission electron microscopy. High resolution observations have revealed the microstructural arrangement of phases. On the basis of these characterizations, a spatial arrangement of the components which fits the composition variations in the deposits is proposed.
引用
收藏
页码：239 / 247
页数：9
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