FABRICATION OF THIN-FILM INTERDIGITAL TRANSDUCERS FOR SURFACE ACOUSTIC-WAVE DEVICES OPERATING AT GIGAHERTZ FREQUENCIES

被引：1
|
作者：
SEILER, DG [1 ]
CAMPBELL, CK [1 ]
机构：
[1] MCMASTER UNIV,COMMUN RES LAB,HAMILTON L8S 4L8,ONTARIO,CANADA
来源：
THIN SOLID FILMS | 1979年 / 62卷 / 01期
关键词：
D O I：
10.1016/0040-6090(79)90388-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：109 / 114
页数：6
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